EK-F5x SFC/SFM6xxx and SFC/SFM5xxx 多功能传感器Sensirion AG

　　Highlights

　　?Disruptive design with integrated electronics

　　?RS485 and I2C digital interface

　　?High accuracy/repeatability (2% / 0.2% set point)

　　?Wide control range (500:1)

　　?No drift and no re-calibration required

　　?Ultra-fast settling time (100 ms)

　　The heart of SFC6000D and SFM6000D is the unsurpassed Sensirion CMOSens® technology. It combines a high precision sensor element with state-of-the-art signal processing on a single chip and thereby providing an accurately calibrated and temperature compensated signal. In fact, the full functionality of the device is integrated directly on the dedicated ASIC chip, which drastically limits the number of electrical components used. Thanks to CMOSens® sensor technology, Sensirion’s flow meters and controllers achieve unmatched ratings for speed, accuracy and repeatability at very attractive system cost. Due to the excellent long-term stability of CMOSens® chips, no recalibration is required. High performance and low cost of SFC6000D and SFM6000D make them the best choice for a wide range of applications, such as gas flushing, FOUP, analytical instrumentation, coating and medical equipment, process automation and gas mixing to name a few. CMOSens® SFC6000D and SFM6000D measure gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up- and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D-converter and further signal processing are based on a single chip using CMOS standard processes (see Figure 1). Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve. This drastically reduces the complexity and the number of electronic components in SFC6000D.

　　MEMS-based CMOSens® technology enables a significantly larger cross section of the gas channel than bypass capillary diameter in conventional mass flow controllers. This channel design makes the device more robust against particles, clogging and humidified gases.

　　The minimal thermal mass of the membrane results in an ultra-fast sensor response time of 3-4 ms. Since the whole design of the amplification, A/D conversion, digital linearization and temperature compensation is matched to the sensor speed, a fully compensated flow measurement value can be delivered every millisecond. Combined with advanced control algorithms, SFC6000D offers greatly reduced settling times compared to conventional mass flow controllers.

　　Furthermore, a special arrangement of the two temperature sensors, on-chip temperature compensation and the minimization of noise sources lead to unbeatable performance with regards to repeatability and accuracy over a large dynamic range. Thanks to the unique CMOSens® technology, the SFC6000D mass flow controllers and SFM6000D mass flow meters show zero-drift performance and control true mass flow independently of the ambient temperature and pressure changes.

　　? 李 进

　　? 深圳博瑞图电子科技有限公司

　　?MOB :

　　?qq : 52519094

　　?ADD :深圳市福田区中航路都会轩3305

　　?EMAIL : lijin810230@163.COM

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